Giant Electromechanical Effect Demonstrated in Miniature Piezoelectric Membrane Devices Using HfZrO2 Films Offers Opportunities for High-Performance Device Development

https://pubmed.ncbi.nlm.nih.gov/38112334

A giant electromechanical effect is demonstrated in miniature piezoelectric membrane devices based on HfZrO2 films, offering new opportunities for developing high-performance piezoelectric devices.