“Novel XY Nanopositioning Stage Design with Spatial Flexure Hinges and Voice Coil Motor Actuators Achieves High-Precision Large-Stroke Motion Guidance and Minimal Errors”

https://pubmed.ncbi.nlm.nih.gov/38117196

This study presents a novel design of an XY nanopositioning stage using spatial flexure hinges and voice coil motor actuators, achieving high-precision large-stroke motion guidance with minimal errors.